Service hotline：400-828-6080
Email：lufeiyu@flyopt.com
Provide fast and accurate inspection with high yield as the core for various occasions
The VMZ-S series offers three major models and a range of high-quality optics, with TTL (through lens) scanning lasers as standard. The combination of high speed and high precision allows for faster completion of measurement tasks.
The VMZ-S series features high precision and high speed measurement capabilities to meet the growing complexity of the demand, but also for a wide range of applications.
Product two points
6 optical zoom systems
The system is designed from scratch to provide high-precision measurements using a specially designed Nikon optical system.
High speed height measurement
High precision, high speed height measurement is achieved through high precision lens laser autofocus, capable of high-speed scanning at 1000 points per second.
The ability to measure difficult samples
Difficult edges and features can be easily measured with Nikon's exclusive lighting accessories.
Uninterrupted automatic measurement
Accurate measurements can be made even if the component positioning changes.
| Model number | VMZ-S3020 | VMZ-S4540 | VMZ-S6555 |
| XYZ range | 300×200×200 mm | 450x400x200 mm | 650x550x200 mm |
| *TZ low power objective: 250×200×200 mm | *TZ low power objective: 400x400x200mm | *TZ low power objective: 600x550x200mm | |
| Minimum reading | 0.01 μm | ||
| Accuracy guarantee | 20 kg (Accuracy guarantee: 5 kg) | 40 kg (Accuracy guarantee: 20 kg) | 50 kg (Accuracy guarantee: 30 kg) |
| Maximum allowable error (L: length mm) | EUX, MPE EUY, MPE 1.2 + 4L / 1000 µm | ||
| EUXY, MPE 2.0 + 4L / 1000 µm | |||
| EUZ, MPE1.2 + 5L / 1000 µm | |||
| Probe error 1),2): MPE PF2D 0.8µm | |||
| In-frame measurement error 1),2): MPE PFV2D 0.3µm | |||
| Camera | Black and white/color 1/3 CMOS Camera | ||
| Lens working distance | Type 1, 2, 3: 50mm | ||
| Type 4: 30mm | |||
| Type TZ: (high power objective) 11 mm/(low power objective) 32 mm | |||
| Type A: 73.5mm (63 mm with laser) | |||
| Laser focus reproducibility 1),3) | 2σ ≦ 0.5 µm | ||
| illuminant | Reflection, transmission, 3 layers 8 direction white LED ring light /Type 4 only 1 layer | ||
| Type A: 73.5mm (63 mm with laser) | |||
| Type A: Reflected, transmitted, single-layer 8 direction white LED ring light | |||
| Power Supply, Power consumption | AC100 V-240 V, 50/60 Hz / 4 A − 2 A | ||
| Size & weight | Main tape base(W×D×H): 700×730×1793 mm / 约 265 kg | Main tape base(W×D×H): 1000×1340×1818 mm / 约 510 kg | Main tape base(W×D×H): 1200×1640×1818 mm / 约 740 kg |
| Control box:190×450×450 mm / 约 12 kg | Control box:190×450×450 mm / 约 12 kg | Control box:190×450×450 mm / 约 12 kg | |
| Footprint size (W×D) 4) | 2700×2400 mm | 3000×3000 mm | 3200×3300 mm |
400-828-6080
